Characterisation and erosion of tungsten nitride multilayers grown by Magnetron/PECVD sputtering in Magnum-PSI

Publication type: 
Conference / Workshop
Autori: 
Alegre D, Acsente T, Martin-Rojo AB, Oyarzabal E, Tabar
Anul: 
2013

Conference / Workshop data

Conference / Workshop: 
14th International Conference on Plasma-Facing Materials and Components for Fusion Applications
Location: 
J
Period: 
13
Presentation method: 
Poster Presentation