Carbon layers cleaning from inside of narrow gaps by a RF glow discharge

Publication type: 
Conference / Workshop
Autori: 
C. Stancu, M. Teodorescu, A. C. Galca, G. Dinescu
Anul: 
2010

Conference / Workshop data

Conference / Workshop: 
12th International Conference on Plasma Surface Engineering, PSE 2010
Location: 
Garmisch-Partenkirchen, Germania
Period: 
12-17 septembrie 2010
Presentation method: 
Poster Presentation