OES monitoring of combined deposition of C/W layers by PECVD/Magnetron Sputtering techniques

Publication type: 
Conference / Workshop
Autori: 
T. Acsente, E. R. Ionita, C. Stancu, M. D. Ionita, G. Dinescu
Anul: 
2010

Conference / Workshop data

Conference / Workshop: 
12th International Conference on Plasma Surface Engineering, PSE 2010
Location: 
Garmisch-Partenkirchen, Germania
Period: 
12-17 septembrie 2010
Presentation method: 
Poster Presentation