CHARACTERIZATION OF Ti-O-N FILMS DEPOSITED ON Ti-Ta-Nb SUBSTRATE BY PLASMA LASER DEPOSITION

Publication type: 
Journal
Autori: 
Cojocaru, VD; Raducanu, D; Scarisoreanu, ND; Cinca, I
Anul: 
2011

Journal data

Journal: 
2011 INTERNATIONAL SEMICONDUCTOR CONFERENCE (CAS 2011), 34TH EDITION, VOLS 1 AND 2
Vol.: 
0
Pag.: 
265 268