SiO2-METAL CANTILEVER STRUCTURES UNDER THERMAL AND INTRINSIC STRESS

Publication type: 
Journal
Autori: 
Tibeica, C; Damian, V; Muller, R
Anul: 
2011

Journal data

Journal: 
2011 INTERNATIONAL SEMICONDUCTOR CONFERENCE (CAS 2011), 34TH EDITION, VOLS 1 AND 2
Vol.: 
0
Pag.: 
167 170