Simultaneous carbon and tungsten thin film deposition using two thermionic vacuum arcs

Publication type: 
Journal
Autori: 
Marcu, A; Ticos, CM; Grigoriu, C; Jepu, I; Porosnicu, C; Lungu, AM; Lungu, CP
Anul: 
2011
DOI: 
http://dx.doi.org/10.1016/j.tsf.2011.01.192

Journal data

Journal: 
THIN SOLID FILMS
Vol.: 
519
Pag.: 
4074 4077