Properties of composite a-C:H/metal layers deposited by combined RF PECVD/magnetron sputtering techniques

Publication type: 
Journal
Autori: 
Acsente, T; Ionita, ER; Colceag, D; Moldovan, A; Luculescu, C; Birjega, R; Dinescu, G
Anul: 
2011
DOI: 
http://dx.doi.org/10.1016/j.tsf.2011.01.201

Journal data

Journal: 
THIN SOLID FILMS
Vol.: 
519
Pag.: 
4054 4058