Monitoring the hydrogenated/fluorinated carbon layers deposition by Optical Emission Spectroscopy

Publication type: 
Conference / Workshop
Authors: 
S.D. Stoica, V. Satulu, T. Acsente, B. Mitu , G. Dinescu
Year: 
2018

Conference / Workshop data

Conference / Workshop: 
ESCAMPIG XXIV
Location: 
Glasgow, Scotland
Period: 
July 17-21, 2018
Presentation method: 
Poster presentation