Deposition of tungsten nitride multilayer thin films by combined magnetron sputtering and nitridation techniques

Publication type: 
Conference / Workshop
Authors: 
Alegre D, Acsente T, Logofatu C, Dinescu G, Tabares FL
Year: 
2012

Conference / Workshop data

Conference / Workshop: 
E-MRS 2012 Spring Meeting
Location: 
Strasbourg, France
Period: 
May 14
Presentation method: 
Poster Presentation