Multi-stage pulsed laser deposition of aluminum nitride at different temperatures

Publication type:

Journal

Authors:

Duta, L; Stan, GE; Stroescu, H; Gartner, M; Anastasescu, M; Fogarassy, Z; Mihailescu, N; Szekeres, A; Bakalova, S; Mihailescu, IN

Year:

2016

DOI:

http://dx.doi.org/10.1016/j.apsusc.2015.10.093

Journal data

Journal:

APPLIED SURFACE SCIENCE

Vol.:

374

Pag.:

143 150