CHARACTERISATION OF TUNGSTEN NITRIDE LAYERS AND THEIR EROSION UNDER PLASMA EXPOSURE IN NANO-PSI

Publication type:

Journal

Authors:

Alegre, D; Acsente, T; Martin-Rojo, AB; Oyarzabal, E; Tabares, FL; Dinescu, G; De Temmerman, G; Birjega, R; Logofatu, C; Kovac, J; Mozetic, M

Year:

2015

Journal data

Journal:

ROMANIAN REPORTS IN PHYSICS

Vol.:

Pag.:

532 546