Wall material interaction with the active species in a nitrogen-methane DC flowing discharge

Publication type: 
Journal
Authors: 
Ciobotaru, LC; Popa, DS
Year: 
2014
DOI: 
http://dx.doi.org/10.1016/j.vacuum.2014.06.003

Journal data

Journal: 
VACUUM
Vol.: 
110
Pag.: 
183 189