R-3 measurement by White Light Interferometry

Publication type: 
Journal
Authors: 
Bojan, M; Apostol, D; Cernescu, N; Iordache, I; Damian, V; Schiopu, P
Year: 
2012
DOI: 
http://dx.doi.org/10.1117/12.974491

Journal data

Journal: 
ADVANCED TOPICS IN OPTOELECTRONICS, MICROELECTRONICS, AND NANOTECHNOLOGIES VI
Vol.: 
8411
Pag.: 
UNSP 841106