Silicon structuring by etching with liquid chlorine and fluorine precursors using femtosecond laser pulses

Publication type: 
Journal
Authors: 
Radu, C; Simion, S; Zamfirescu, M; Ulmeanu, M; Enculescu, M; Radoiu, M
Year: 
2011
DOI: 
http://dx.doi.org/10.1063/1.3619856

Journal data

Journal: 
JOURNAL OF APPLIED PHYSICS
Vol.: 
110
Pag.: 
34901