Comparison of Ti/Au, Ni/Au, and Sc/Au ohmic contact metal stacks on (Al0.18Ga0.82)2O3

Publication type:

Journal

Authors:

HH Wan,; CC; Chiang, JS Li,; F Ren,; F Alema,; A Osinsky,; V Craciun,; SJ Pearton

Year:

2024

DOI:

https://DOI10.1007/s10853-024-10330-2

Journal data

Journal:

Journal of Materials Science

Vol.:

Issue:

Pag.:

19152-19160